Please use this identifier to cite or link to this item: http://rguir.inflibnet.ac.in:8080/jspui/handle/123456789/15487
Title: Nano- and Micro- Electromechanical Systems :
Other Titles: Fundamentals of Nanoand Microengineering
Authors: Lyshevski, Sergey Edward
Keywords: Micro- Electromechanical
Issue Date: 2005
Publisher: CRC Press
URI: http://rguir.inflibnet.ac.in:8080/jspui/handle/123456789/15487
ISBN: 978-0-8493-2838-1
Appears in Collections:Electronics and Communication Engineering

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