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dc.contributor.authorLyshevski, Sergey Edward-
dc.date.accessioned2023-01-04T10:47:39Z-
dc.date.available2023-01-04T10:47:39Z-
dc.date.issued2005-
dc.identifier.isbn978-0-8493-2838-1-
dc.identifier.urihttp://rguir.inflibnet.ac.in:8080/jspui/handle/123456789/15487-
dc.language.isoenen_US
dc.publisherCRC Pressen_US
dc.subjectMicro- Electromechanicalen_US
dc.titleNano- and Micro- Electromechanical Systems :en_US
dc.title.alternativeFundamentals of Nanoand Microengineeringen_US
dc.typeBooken_US
Appears in Collections:Electronics and Communication Engineering

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