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Title: Handbook of Optical Dimensional Metrology
Authors: Harding, Kevin
Keywords: OpticS and OptOelectrOnicS
Advanced Optical Micro-Metrology Methods
Issue Date: 2013
Publisher: Taylor & Francis Group
Series/Report no.: SerieS in OpticS and OptOelectrOnicS;
ISBN: 978-1-4398-5482-2
Appears in Collections:Physics

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