Please use this identifier to cite or link to this item: http://rguir.inflibnet.ac.in:8080/jspui/handle/123456789/16093
Title: Handbook of Photomask Manufacturing Technology
Authors: Rizvi, Syed
Keywords: Masks for Electron Beam Projection Lithography
Issue Date: 2005
Publisher: Taylor & Francis Group
URI: http://rguir.inflibnet.ac.in:8080/jspui/handle/123456789/16093
ISBN: 978-1-4200-2878-2
Appears in Collections:Electronics and Communication Engineering

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