Please use this identifier to cite or link to this item:
http://rguir.inflibnet.ac.in:8080/jspui/handle/123456789/16093
Title: | Handbook of Photomask Manufacturing Technology |
Authors: | Rizvi, Syed |
Keywords: | Masks for Electron Beam Projection Lithography |
Issue Date: | 2005 |
Publisher: | Taylor & Francis Group |
URI: | http://rguir.inflibnet.ac.in:8080/jspui/handle/123456789/16093 |
ISBN: | 978-1-4200-2878-2 |
Appears in Collections: | Electronics and Communication Engineering |
Files in This Item:
File | Description | Size | Format | |
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Handbook of Photomask Manufacturing Technology.pdf Restricted Access | 18.39 MB | Adobe PDF | View/Open Request a copy |
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