Digital Library at Rajiv Gandhi University, Arunachal Pradesh
The Digital Library at Rajiv Gandhi University, Arunachal Pradesh is an online emplacement for collecting, preserving, and disseminating the institute's quality teaching research and extension output to the Global community.
Please use this identifier to cite or link to this item:
http://rguir.inflibnet.ac.in:8080/jspui/handle/123456789/9135| Title: | Silicon Wet Bulk Micromachining for MEMS: |
| Authors: | Pal, Prem Sato, Kazuo |
| Issue Date: | 2017 |
| Publisher: | Pan Stanford Publishing. |
| Citation: | Silicon Wet Bulk Micromachining for MEMS. |
| URI: | http://rguir.inflibnet.ac.in:8080/jspui/handle/123456789/9135 |
| ISBN: | 978-1-315-36492-6 |
| Appears in Collections: | Physics |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Silicon Wet Bulk Micromachining for MEMS.pdf Restricted Access | 13.77 MB | Adobe PDF | View/Open Request a copy |
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