Digital Library at Rajiv Gandhi University, Arunachal Pradesh
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http://rguir.inflibnet.ac.in:8080/jspui/handle/123456789/9135Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Pal, Prem | - |
| dc.contributor.author | Sato, Kazuo | - |
| dc.date.accessioned | 2022-08-05T06:56:06Z | - |
| dc.date.available | 2022-08-05T06:56:06Z | - |
| dc.date.issued | 2017 | - |
| dc.identifier.citation | Silicon Wet Bulk Micromachining for MEMS. | en_US |
| dc.identifier.isbn | 978-1-315-36492-6 | - |
| dc.identifier.uri | http://rguir.inflibnet.ac.in:8080/jspui/handle/123456789/9135 | - |
| dc.language.iso | en | en_US |
| dc.publisher | Pan Stanford Publishing. | en_US |
| dc.title | Silicon Wet Bulk Micromachining for MEMS: | en_US |
| dc.type | Book | en_US |
| Appears in Collections: | Physics | |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Silicon Wet Bulk Micromachining for MEMS.pdf Restricted Access | 13.77 MB | Adobe PDF | View/Open Request a copy |
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